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CCD
Electric Ultra-high Vacuum Gate Valve
CCD electric ultra-high vacuum gate valve uses electric device to drive the stem, moving valve disc up and down to make the valve opened or closed. It is used to put through or cut off the airflow in vacuum pipeline. Applicable medium can be pure air and noncorrosive gases.
With signal feedback device. |
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Main Technical Performance |
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| Vacuum Range: |
105~1.3x10-7Pa(DN≤200)
105~6.7x10-7Pa(DN≥250) |
| Valve Leak Rate: |
≤6.7x10-8 Pa.L/S(DN≤200)
≤1.3x10-7 Pa.L/S((DN≥250) |
Applicable Temperature: |
-30~+150℃(Viton) |
| Difference Pressure at Opening : |
≤2.7x103 Pa. |
| Power Voltage: |
220V/50Hz |
| Mounting state: |
Any ,but level si the best. |
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Materials of Main Parts |
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Body and disc: stainless steel
Sealing element: Viton, bellows (shaft seal), NBR |
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| Overall and Connection Dimensions (mm) |
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