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CCQ Series
Pneumatic Ultra-high Vacuum Gate Valve
CCQ pneumatic ultra-high vacuum gate valve relies on the electromagnetic directional valve to change the gas flowing direction and control the actuating cylinder to drive the valve plate to make up-and-down movements to open or close the valve to connect or cut off the sirflow in the vacuum pipeline.The applicable media include clean sir or non-corrosive gases.It is provided with a feedback signal device. |
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Main Technical Performance |
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| Vacuum Range： |
105~1.3x10-7Pa(DN≤200）
105~6.7x10-7Pa(DN≥250） |
| Valve Leak Rate： |
≤6.7x10-8 Pa.L/S(DN≤200）
≤1.3x10-7 Pa.L/S((DN≥250）） |
Applicable Temperature： |
-30~+150℃ |
| Difference Pressure at Opening : |
≤2.7x103 Pa. |
| Actuator Air Pressure ：: |
0.4-0.6MPa |
| Mounting state： |
Any |
| Power Voltage： |
standard：220V/50Hz，
Special：AC110V,DC24V |
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Materials of Main Parts |
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Valve Body and plate: stainless steel
Sealing element: fluorine rubber,corrugated tube(shaft gland) |
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| Overall and Connection Dimensions (mm) |
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