CIQ Series
Pneumatic ultra-High-Vacuum Butterfly Valve
CIQ Pneumatic ultra-high-vacuum butterfly valve is used to connect or cut off the airflow in the vacuum pipeline. It completes the process of closing or opening the disc through two actions.Both sides of the valve are provided with either forward or reverse installing directions.Its pressure intensity range can extend to 2X105-1.3-7X10Pa.The applicable media include clean air or non-corrosive gases.
Main Technical Performance
Vacuum Range:
2x105~6.7-7x10Pa
Valve Leak Rate:
≤1.3x10-7 Pa.L/S(正反向)
Applicable Temperature :
-30~+150℃
Mounting state:
Any
Install Direction:
Any
Differential Pressure at Opening
2x 105 Pa
Opening Angle :
0-90°
Open-close Time
3S
Materials of Main Parts
Valve Body , disc and stem: stainless steel
Sealing element:fluorine rubber,corrugated tube(shaft gland)